Simon Herrlich a , Sven Spieth a , Stephan Messner a , Roland Zengerle a,b,c, a HSG-IMIT — Institut für Mikro- und Informationstechnik der Hahn-Schickard-Gesellschaft e.V., Wilhelm-Schickard-Str. 10, 78052 Villingen-Schwenningen, Germany b Laboratory for MEMS Applications, Department of Microsystems Engineering (IMTEK), University of ...